MJ-10 Metal Jetting System
MJ-10 Metal Jetting System is used to fabricate metal electrodes on materials and substrates with high precisions. Au, Pt, Ag, and W are widely used as the metal paste, and be deposited on Si, SiO2, SiNx, PI, PEEK, PBI, ZnO, SnO2, TiO2 et, al. This system are useful for MEMS sensors and IC design.
1. Feature
01) No infection for materials or substrates
02) No mask, the figure are designed and deposited directly
03) High precision
04) High voltage up to 150 V
05) Various metal pastes for electrodes with different structures
06) Availabe to deposit insulating layer and function materials
2. Specifications
01) X-Y range: 210 mm * 260 mm
02) X-Y precision: ±10 µm / ±5 µm
03) Two CCD
04) Gas pressure control
05) Jeting probe: 20~100 µm
06) Paste: Ag-Pd, Ag, Pt, Au, Ti, C, et, al
07) Substrate: Si-based materials, Metal oxides, ceramics，et, al
08) Electrode width: down to 40 μm
09) Electrode distance: down to 20 μm
10) Communction: USB
11) Size: 1150 mm × 750 mm × 1730 mm
3. Pastes
01) PEDOT/PSS, 1.3 wt%
02) Ag, with particle size of 200~300 nm, for TIO and glasses
03) Au, with particle size of 5~10 nm
4. Photographs
5. Typical results
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